FUZZY OPTIMIZATION OF AN ELECTRON-OPTICAL LENS

In ordinary optimum methods, the geometric parameters and electric par ameters are constrained in some closed intervals. From the view of eng ineering, the physical variables which give some definite boundaries a re not strictly constrained, so this paper proposes the fuzzy optimiza tion of an electron optical lens. In this method, the constraints of t he structure parameters and the electric parameters are considered as fuzzy intervals in a real field. A fuzzy optimum set has also been obt ained. A four electrodes extended field lens (4EFL) is taken as an exa mple to be fuzzy optimized, and the curve of optimal points in the 4EF L is plotted in this paper. Because this method has taken account of t he fuzzy factors, its result will fit with the practical condition pro perly.