Pc. Mehra Rm",inderbir,jasmina,"mathur, TAILORING REFRACTIVE-INDEX OF A-SI-H BY TBP (C4H11P) DOPING, Journal of non-crystalline solids, 209(1-2), 1997, pp. 188-192
The refractive index, n, and extinction coefficient, k, of n-type TBP
(tetriarybutylphosphine) doped a-Si:H films is reported. TBP is prefer
red over phosphine because of its lower toxicity and pyrophoricity. Th
e films were deposited using glow discharge (plasma lab mu P) techniqu
e. The optical constants, n, k and absorption coefficient, a are deter
mined as functions of wavelength, lambda and doping concentration. The
refractive index is found to decrease as the TBP/SiH4 ratio increases
from 0.1% to 3%. This decrease is due to increase in the internal str
ain in amorphous network. Also the refractive index and extinction coe
fficient decrease with increase in wavelength in the range of 600 to 9
00 nm.