B. Willen et al., INGAAS INP HETEROJUNCTION BIPOLAR-TRANSISTOR GROWN BY ALL-SOLID SOURCE MOLECULAR-BEAM EPITAXY/, Electronics Letters, 31(17), 1995, pp. 1514-1515
State-of-the-art InGaAs/lnP heterojunction bipolar transistors were gr
own by all-solid source molecular beam epitaxy. Fabricated transistors
showed cutoff frequencies of >100 GHz with an emitter area of 1.5 x 5
mu M(2). Together with recent studies, these results demonstrate that
the valved cracker technique is a very competitive nontoxic growth me
thod.