INDUSTRIAL APPLICATIONS OF PLASMA AND ION SURFACE ENGINEERING

The use of plasma and ion technologies in industrial applications is r apidly increasing. Plasma techniques make possible or enhance PVD and CVD processes. They present new means for surface and subsurface modif ications. In many cases, they provide new, environmentally compatible solutions for old problems. New processes and equipment are available which are suitable for industrial exploitation. A few examples will il lustrate this. Duplex coatings combining a nitriding treatment and ion plated thin films on tools and machine parts boost their performance in many applications. Diamond films for various applications are depos ited by plasma techniques. Metal containing diamond-like carbon films improve the wear performance of tribological systems. Surface can be c leaned without the use of any solvents. Plastics can be conditioned to provide good adhesion for paints and glues. New equipment is availabl e for the deposition of films for flat panel displays. Plasma impulse CVD is used for the production of optical thin films.