RADIOFREQUENCY LOW-PRESSURE SUPERSONIC JET PLASMA CHEMICAL-SYSTEM

Authors
SICHA M SOUKUP L JASTRABIK L NOVAK M TICHY M
Citation
M. Sicha et al., RADIOFREQUENCY LOW-PRESSURE SUPERSONIC JET PLASMA CHEMICAL-SYSTEM, Surface & coatings technology, 74-5(1-3), 1995, pp. 212-214
Citations number
5
Categorie Soggetti
Materials Science, Coatings & Films
Journal title
Surface & coatings technology → ACNP
ISSN journal
02578972
Volume
74-5
Issue
1-3
Year of publication
1995
Pages
212 - 214
Database
ISI
SICI code
0257-8972(1995)74-5:1-3<212:RLSJPC>2.0.ZU;2-O
Abstract
This paper presents a refined model for the generation of a supersonic plasma jet by a hollow cathode discharge inside the nozzle of a low p ressure r.f. plasma chemical reactor. Through the nozzle which is plac ed in the r.f. electrode the working gas flows to the reactor chamber. If at the outlet of the nozzle the gas flow is supersonic, a well-def ined plasma jet is created inside the reactor chamber. The application of this system for the deposition of germanium nitride thin films is shown.