Authors
Citation
M. Zeuner et J. Meichsner, ION ENERGY-DISTRIBUTIONS IN AN RF-DC-TRIODE GLOW-DISCHARGE, Surface & coatings technology, 74-5(1-3), 1995, pp. 562-566
Citations number
15
Categorie Soggetti
Materials Science, Coatings & Films
Journal title
ISSN journal
02578972
Volume
74-5
Issue
1-3
Year of publication
1995
Pages
562 - 566
Database
ISI
SICI code
0257-8972(1995)74-5:1-3<562:IEIARG>2.0.ZU;2-M
Abstract
Ion kinetic investigations are performed on a 13.56 MHz r.f.-d.c.-trio
de discharge using argon as the process gas. The incident ions on the
grounded electrode are separated, according to their mass and energy,
and the influence of total pressure and d.c. voltage on the ion energy
distribution, the discharge potential conditions and the plasma sheat
h thickness are discussed.