Zh. Barber et al., THE FABRICATION AND CHARACTERIZATION OF NBCN ALN HETEROSTRUCTURES/, IEEE transactions on applied superconductivity, 5(2), 1995, pp. 2314-2317
Very high quality niobium nitride based superconductor - insulator - s
uperconductor (SIS) junctions have been prepared using aluminium nitri
de barrier layers deposited by dc reactive magnetron sputtering. These
barriers have been shown to grow epitaxially on high quality epitaxia
l niobium carbonitride (NbCN) base electrodes. High total gap voltages
, equal to the maximum that can be expected theoretically, illustrate
that there are no degraded layers at the superconductor/insulator inte
rfaces. We have also demonstrated the first niobium nitride based SISI
S double barrier devices. Transmission electron microscopy has been us
ed to study the growth of a thick AlN layer sandwiched between NbCN an
d the microstructure of NbCN/AlN multilayers prepared with several dif
ferent orientation relationships.