Rd. Sandell et al., MULTICHIP PACKAGING FOR HIGH-SPEED SUPERCONDUCTING CIRCUITS, IEEE transactions on applied superconductivity, 5(2), 1995, pp. 3160-3163
We report the development of a multi-chip module (MCM) technology usin
g Nh metallization and benzocyclobutene (BCB) polymer dielectric. The
Nb/BCB structure displays very low loss, has low processing temperatur
e, and forms a wide range of microstrip transmission line impedances.
We are developing flip chip, solder attachment for die mounting. We al
so report the electrical characterization of Nb/BCB/Nb for both micros
trip resonators, delay lines, and bandpass filters.