Cd. Reintsema, A NOVEL METHOD OF REALIZING 2-DIMENSIONAL ARRAY SYSTEMS OF HIGH-T-C STEP-EDGE JOSEPHSON-JUNCTIONS, IEEE transactions on applied superconductivity, 5(2), 1995, pp. 3259-3262
We have developed a unique substrate terracing process to achieve two-
dimensional arrays of high-T-c step-edge superconductor-normal metal-s
uperconductor Josephson junctions. This process has been used to reali
ze 3x3 and 3x6 antenna coupled arrays for direct detection of emission
. An enhancement to this process incorporating a YBa2Cu3O7-delta base
layer and a Nb/PdAu ground plane is described. This modification enabl
ed the fabrication of arrays capacitively coupled to detector junction
s for detection of emission at frequencies beyond 300 GHz. This report
details the motivation, design, fabrication process, and preliminary
results of several array experiments.