PRODUCTION OF ACTIVE SPECIES FOR SURFACE TREATMENTS

Authors
RICARD A
Citation
A. Ricard, PRODUCTION OF ACTIVE SPECIES FOR SURFACE TREATMENTS, Le Vide, les couches minces, 51(275), 1995, pp. 1-23
Citations number
22
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Le Vide, les couches minces → ACNP
ISSN journal
02234335
Volume
51
Issue
275
Year of publication
1995
Pages
1 - 23
Database
ISI
SICI code
0223-4335(1995)51:275<1:POASFS>2.0.ZU;2-2