PLASMA REACTORS

Authors
Citation
Jj. Bessot, PLASMA REACTORS, Le Vide, les couches minces, 51(275), 1995, pp. 40-54
Citations number
19
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
ISSN journal
02234335
Volume
51
Issue
275
Year of publication
1995
Pages
40 - 54
Database
ISI
SICI code
0223-4335(1995)51:275<40:PR>2.0.ZU;2-8