APPLICATION OF HIGH-CURRENT-DENSITY PLASM A SOURCES IN THE SURFACE-TREATMENT INDUSTRY

Authors
DINGREMONT N COLLIGNON P
Citation
N. Dingremont et P. Collignon, APPLICATION OF HIGH-CURRENT-DENSITY PLASM A SOURCES IN THE SURFACE-TREATMENT INDUSTRY, Le Vide, les couches minces, 51(275), 1995, pp. 59-61
Citations number
22
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Le Vide, les couches minces → ACNP
ISSN journal
02234335
Volume
51
Issue
275
Year of publication
1995
Pages
59 - 61
Database
ISI
SICI code
0223-4335(1995)51:275<59:AOHPAS>2.0.ZU;2-J