RECENT DEVELOPMENTS IN PECVD DIAPLAS TECH NOLOGY FOR HIGH-QUALITY HARDENING ON ORGANIC SUBSTRATES

Authors
KOLLER A WOHLRAB C HOFFER M LEDRET M
Citation
A. Koller et al., RECENT DEVELOPMENTS IN PECVD DIAPLAS TECH NOLOGY FOR HIGH-QUALITY HARDENING ON ORGANIC SUBSTRATES, Le Vide, les couches minces, 51(275), 1995, pp. 62-69
Citations number
NO
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Le Vide, les couches minces → ACNP
ISSN journal
02234335
Volume
51
Issue
275
Year of publication
1995
Pages
62 - 69
Database
ISI
SICI code
0223-4335(1995)51:275<62:RDIPDT>2.0.ZU;2-W