THE ELECTRON-ENERGY DISTRIBUTION FUNCTION IN A SHIELDED ARGON RADIOFREQUENCY INDUCTIVE DISCHARGE

The electron-energy distribution function (EEDF) and its integrals suc h as plasma density and effective electron temperature have been measu red in an inductively coupled plasma. The EEDFs were measured together with electrical discharge characteristics over a wide range of argon gas pressure between 1 mTorr and 1 Torr. The discharge was maintained by an internal induction coil, which was electrostatically shielded to provide a purely inductive discharge. All measurements were related t o RF power dissipated in the plasma. Non-Maxwellian EEDFS were found t hat differ significantly from those found in capacitive RF discharges and in inductive discharges without or with only partial electrostatic shielding.