CHARACTERIZATION OF ADSORPTION IN FLOW-TYPE ATOMIC LAYER EPITAXY REACTOR (VOL 81, PG 281, 1994)

Authors
AARIK J SIIMON H
Citation
J. Aarik et H. Siimon, CHARACTERIZATION OF ADSORPTION IN FLOW-TYPE ATOMIC LAYER EPITAXY REACTOR (VOL 81, PG 281, 1994), Applied surface science, 90(1), 1995, pp. 109-109
Citations number
1
Categorie Soggetti
Physics, Condensed Matter","Chemistry Physical","Materials Science, Coatings & Films
Journal title
Applied surface science → ACNP
ISSN journal
01694332
Volume
90
Issue
1
Year of publication
1995
Pages
109 - 109
Database
ISI
SICI code
0169-4332(1995)90:1<109:COAIFA>2.0.ZU;2-G