SELF-CONSISTENT RATE THEORY OF SUBMONOLAYER HOMOEPITAXY WITH ATTACHMENT DETACHMENT KINETICS/

The reversible nucleation and growth of two-dimensional islands during the submonolayer stage of epitaxial growth is studied with self-consi stent rate equations and kinetic Monte Carlo simulations. In contrast to most previous work, we take account of the effects of both a finite energy barrier to the detachment of atoms from islands and a finite b arrier to the incorporation of adatoms into islands. A correct boundar y condition for the diffusion field at island edges is derived that ta kes account of these processes. For small detachment rates, quantitati ve agreement is obtained between the solutions to the rate theory and the simulations for the average monomer and island densities as a func tion of coverage.