SPATIAL STRUCTURE OF MICROWAVE-DISCHARGE IN LOW-PRESSURE ARGON

Authors
IVANOV VV POPOV AM RAKHIMOVA TV
Citation
Vv. Ivanov et al., SPATIAL STRUCTURE OF MICROWAVE-DISCHARGE IN LOW-PRESSURE ARGON, Plasma physics reports, 21(6), 1995, pp. 516-521
Citations number
18
Categorie Soggetti
Phsycs, Fluid & Plasmas
Journal title
Plasma physics reports → ACNP
ISSN journal
1063780X
Volume
21
Issue
6
Year of publication
1995
Pages
516 - 521
Database
ISI
SICI code
1063-780X(1995)21:6<516:SSOMIL>2.0.ZU;2-W
Abstract
A numerical self-consistent model of a low-pressure microwave discharg e is developed utilizing a particle-in-cell technique and is used to c alculate the electron energy distributions for the case of electroposi tive,eases. Based on this model, a study is made of the processes in t he argon microwave discharge in the pressure range pd similar or equal to 10(-3) - 10(-1) torr cm. The numerical results are compared with e xperimental data.