A new type of spatially controlled model catalyst was prepared by elec
tron beam lithography. The catalyst consisted of a square array of dis
c shaped platinum particles 50 nm in diameter and spaced at 200 nm on
an oxidized silicon wafer. The catalyst was cleaned of surface contami
nants by low energy neon ion sputtering without adversely altering the
characteristics of the array. Catalytic activity was confirmed by per
forming ethylene hydrogenation at high pressure. Evidence of deuterium
spillover was seen by thermal desorption experiments.