SPATIAL-FREQUENCY BANDWIDTH IN THE PHOTOLITHOGRAPHIC TRANSFER OF SUBMICRON GRATINGS

Authors
PARRIAUX O VUILLIOMENET H SIXT P CUNY N
Citation
O. Parriaux et al., SPATIAL-FREQUENCY BANDWIDTH IN THE PHOTOLITHOGRAPHIC TRANSFER OF SUBMICRON GRATINGS, Optical engineering, 34(9), 1995, pp. 2657-2659
Citations number
4
Categorie Soggetti
Optics
Journal title
Optical engineering → ACNP
ISSN journal
00913286
Volume
34
Issue
9
Year of publication
1995
Pages
2657 - 2659
Database
ISI
SICI code
0091-3286(1995)34:9<2657:SBITPT>2.0.ZU;2-9
Abstract
The principle of the photolithographic mask transfer of high-spatial-f requency gratings under the Littrow angle is shown to be so tolerant t hat a broad spatial-frequency spectrum can be transferred under the sa me exposure conditions.