MOLECULAR-BEAM-EPITAXY GROWTH OF CDTE ON INSB(110) MONITORED IN-SITU BY RAMAN-SPECTROSCOPY

Citation
D. Drews et al., MOLECULAR-BEAM-EPITAXY GROWTH OF CDTE ON INSB(110) MONITORED IN-SITU BY RAMAN-SPECTROSCOPY, Journal of applied physics, 78(6), 1995, pp. 4060-4065
Citations number
26
Categorie Soggetti
Physics, Applied
Journal title
ISSN journal
00218979
Volume
78
Issue
6
Year of publication
1995
Pages
4060 - 4065
Database
ISI
SICI code
0021-8979(1995)78:6<4060:MGOCOI>2.0.ZU;2-Q
Abstract
CdTe epitaxial layers were deposited on clean cleaved InSb(110) substr ates by molecular-beam epitaxy at room temperature and elevated temper atures. The formation of interface and layer was investigated using Ra man spectroscopy as a growth monitor, i.e,, Raman spectra were taken o n line without interruption of the deposition process, Fabry-Perot int erference of the incident as well as the scattered light within the he terostructure leads to a characteristic modulation of the substrate ph onon scattering intensity. The modulation is calculated and serves as a measure for the layer thickness. For the deposition at elevated temp eratures the true surface temperature is determined from the InSb TO p honon frequency shift. While at a substrate temperature of 150 degrees C the crystalline quality of the CdTe layer was improved compared to room-temperature growth, the deposition of CdTe at 300 degrees C resul ted in the formation of a layer consisting of In2Te3 and liberated Sb. The effect of the laser radiation on the growth process at different temperatures is also discussed. (C) 1995 American Institute of Physics .