DIAMOND-LIKE CARBON-FILMS DEPOSITED BY LASER-ABLATION USING FROZEN ACETYLENE TARGETS

A new laser ablation method based on frozen gas targets was tested by depositing carbon films. The source gas was acetylene. With an ArF las er at a power density of 9 x 10(8) W/cm(2) the deposition rate varied from 17 nm/min at room temperature to 13 nm/min at a substrate tempera ture of 300 degrees C. The films showed the broad Raman peak at 1540 c m(-1) characteristic of diamond-like carbon films. A KrF laser produce d the diamond-like carbon films at substrate temperatures above 200 de grees C. Particles were absent in the films if the power density was n ot excessively high. Energetic species ejected from frozen acetylene i mproved the adherence of the films to quartz substrates. (C) 1995 Amer ican Institute of Physics.