M. Hanabusa et K. Tsujihara, DIAMOND-LIKE CARBON-FILMS DEPOSITED BY LASER-ABLATION USING FROZEN ACETYLENE TARGETS, Journal of applied physics, 78(6), 1995, pp. 4267-4269
A new laser ablation method based on frozen gas targets was tested by
depositing carbon films. The source gas was acetylene. With an ArF las
er at a power density of 9 x 10(8) W/cm(2) the deposition rate varied
from 17 nm/min at room temperature to 13 nm/min at a substrate tempera
ture of 300 degrees C. The films showed the broad Raman peak at 1540 c
m(-1) characteristic of diamond-like carbon films. A KrF laser produce
d the diamond-like carbon films at substrate temperatures above 200 de
grees C. Particles were absent in the films if the power density was n
ot excessively high. Energetic species ejected from frozen acetylene i
mproved the adherence of the films to quartz substrates. (C) 1995 Amer
ican Institute of Physics.