THIN-FILMS OF CUBIC BORON-NITRIDE ON SILICON

Citation
Ds. Zhou et al., THIN-FILMS OF CUBIC BORON-NITRIDE ON SILICON, Philosophical magazine letters, 72(3), 1995, pp. 163-166
Citations number
15
Categorie Soggetti
Physics, Condensed Matter
ISSN journal
09500839
Volume
72
Issue
3
Year of publication
1995
Pages
163 - 166
Database
ISI
SICI code
0950-0839(1995)72:3<163:TOCBOS>2.0.ZU;2-N
Abstract
Thin films of cubic boron nitride were grown on Si(100) surfaces using an ion-beam-assisted physical vapour deposition process. We studied t he film microstructure with transmission electron microscopy and selec ted-area electron diffraction. The films are polycrystalline with a gr ain size as large as 0.4 mu m. Sometimes individual grains are found t o extend through the film. Electron diffraction and large-angle tiltin g were used to identify clearly the structure as cubic boron nitride. Multiple twins on (111) planes are abundant in individual grains, as r evealed by electron diffraction.