M. Vahdati et al., INVESTIGATION ON THE CUTTING MODE AND BEHAVIOR OF SINGLE-CRYSTALLINE SILICON UNDER SINGLE-POINT DIAMOND CUTTING, International journal of the Japan Society for Precision Engineering, 29(2), 1995, pp. 128-133
Different industrial of silicon has grown up in recent years very shar
ply. It is possible to use silicon in various shapes and mechanical co
nditions. However, a comprehensive knowledge of its behaviour under cu
tting process will be necessary for the newer applications. Single Poi
nt Diamond Cutting (SPDC) seems to have delightful results in case of
obtaining fine surface finish and/or mirror-like surface. In this resp
ect we tried to specify machining characteristics of silicon for cutti
ng process, cleared the relation-ship between surface roughness, nose
radius of cutting tool and feed rate. Single crystalline natural diamo
nd was used as a cutting tool. During the experiment, by comparing dif
ferent tool nose radii, we could understand that a 5mm nose radius of
diamond bite, together with about 2 approximate to 4 mu m/rev of feed
rate can produce the best surface roughness. at the same time, it has
been observed that, the bigger tool nose radius causes more chatter vi
bration in tooling system which leads to deterioration of surface cond
ition.