T. Tanbunek et al., DFB LASERS INTEGRATED WITH MACH-ZEHNDER OPTICAL MODULATOR FABRICATED BY SELECTIVE-AREA GROWTH MOVPE TECHNIQUE, IEEE photonics technology letters, 7(9), 1995, pp. 1019-1021
The first monolithically integrated DFB laser/Mach-Zehnder interferome
tric modulator fabricated by the selective area low pressure MOVPE gro
wth technique is reported, A near 3-dB power divider at the Y-branches
of the interferometer has been reproducibly achieved by a photolithog
raphically defined dielectric mask used in the selective area growth t
echnology and confirmed by an infrared near field imaging technique, A
modulation depth of over 12 dB was achieved both in the forward and r
everse bias to the arms of the phase modulator.