DFB LASERS INTEGRATED WITH MACH-ZEHNDER OPTICAL MODULATOR FABRICATED BY SELECTIVE-AREA GROWTH MOVPE TECHNIQUE

The first monolithically integrated DFB laser/Mach-Zehnder interferome tric modulator fabricated by the selective area low pressure MOVPE gro wth technique is reported, A near 3-dB power divider at the Y-branches of the interferometer has been reproducibly achieved by a photolithog raphically defined dielectric mask used in the selective area growth t echnology and confirmed by an infrared near field imaging technique, A modulation depth of over 12 dB was achieved both in the forward and r everse bias to the arms of the phase modulator.