MONOLITHICALLY INTEGRATED DBR LASER, DETECTOR, AND TRANSPARENT WAVE-GUIDE FABRICATED IN A SINGLE GROWTH STEP

The monolithic integration of a GaAs-AlGaAs distributed Bragg reflecto r (DBR) laser with a nonabsorbing grating section, a transparent waveg uide, and an absorbing photodetector is reported, Transparent and abso rbing segments were defined after growth by vacancy-enhanced quantum-w ell disordering (VED), Laser output power was 5 mW with a threshold cu rrent of 22 mA, Detector current was linearly dependent on the laser o utput power and the emission from the grating side of the laser could be directly coupled into the detector, The conversion efficiency, defi ned as the ratio between detector current and laser output power, was 0.47 A/W, Using a comparison with as-grown, SiO2-capped and SrF2-cappe d devices, both lasers and detectors were not seen to be adversely aff ected by the anneal required for the VED.