PASSIVELY ALIGNED HYBRID INTEGRATION OF 8X1 MICROMACHINED MICRO-FRESNEL LENS ARRAYS AND 8X1 VERTICAL-CAVITY SURFACE-EMITTING LASER ARRAYS FOR FREE-SPACE OPTICAL INTERCONNECT

Surface micromachining technique has been successfully applied to the fabrications of a three-dimensional 8 x 1 micro-Fresnel lens array and other novel three-dimensional alignment structures, With the help of these three-dimensional structures, self-aligned integration of the mi cro-Fresnel lens array and an 8 x 1 vertical-cavity surface-emitting l aser (VCSEL) array is realized for the first time with passive alignme nt. Individual addressing of the VCSEL/micro-lens element is also succ essfully demonstrated, With their three-dimensional and array structur al characteristics, they are very attractive for free-space optical in terconnect and other integrated micro-optical systems.