PARTICLE MEASUREMENT IN SPECIALITY GASES

The concentration of particles in specialty gas systems can vary not o nly from point-to-point but also overtime. Such variations are most ev ident inside a gas cylinder and after pressure reduction. The observed levels of particulate contamination are not necessarily indicative of system quality because the measurements depend on the specific point of sampling and effects such as handling, pressure reduction, chemical reactions, and settling that lead to particulate variability. New ins trumentation and measurement strategies are needed to cope with partic ulate variability in specialty-gas systems.