CHARACTERIZATION OF A ZR M-XI (HV=151.6 EV) SOURCE FOR SOFT-X-RAY PHOTOEMISSION SPECTROSCOPY

The M zeta emission of a Zr anode (h nu = 151.6 eV) is characterized f or use in soft X-ray photoemission spectroscopy. The Fermi edge spectr um of Al is recorded as a function of the resolution of the electron e nergy analyzer. Least-squares fits are performed using a Fermi-Dirac f unction convoluted with a gaussian-broadened lorentzian representing t he combined effects of the Zr M zeta natural linewidth (0.77 eV), inho mogeneous broadening of the M zeta spectrum and finite analyzer resolu tion. The empirical system resolution function thus determined is deco nvoluted from core-level or valence-band data for Au, Al and GaN, resu lting in enhanced resolution. Least-squares fits of the resolution-enh anced core levels with gaussian-broadened lorentzian (GaN Ga3d) or Don iach-Sunjic (A12p) functions are performed and lineshape parameters ob tained.