Continuous wavelength tuning of 19.1 nm is reported for vertical-cavit
y surface-emitting lasers. Stress-matched dielectric mirror stacks are
added to the micromachined deformable-membrane top mirror to enhance
reflectance, resulting in devices with 6.5% quantum efficiency and thr
eshold current as low as 0.34 mA. The laser operates in single mode ne
ar 968 nm with 24 dB mode suppression ratio and tuning voltages are be
low 18 V. (C) 1997 American Institute of Physics.