AUTOMATIZED SYSTEM FOR MEASURING THE SURFACE-DENSITY OF CURRENT CARRIERS AND ELECTRICAL PERMITTIVITY OF CONDUCTING MATERIALS

An automatised system fbr analyzing the electron topography of a condu cting surface (semiconductors, metals, ferrites or conductor ceramics) is represented. The function of the system is based on the recently o bserved surface photo-charge effect. The investigation is express and contactless. The system allows visualisations of different formations on the surface such as defects, ion-implanted areas, etc. on a compute r screen. The structure of the system is described The results from in vestigation with GaP and Cu are reported.