MASS-SPECTROMETRIC STUDY OF THE GAS-PHASE DURING CHEMICAL-VAPOR-DEPOSITION OF PYROLYTIC CARBON

Authors
FAUCANILLAC F CARRERE F REYNES A VAHLAS C MAURY F
Citation
F. Faucanillac et al., MASS-SPECTROMETRIC STUDY OF THE GAS-PHASE DURING CHEMICAL-VAPOR-DEPOSITION OF PYROLYTIC CARBON, Journal de physique. IV, 5(C5), 1995, pp. 89-96
Citations number
16
Categorie Soggetti
Physics
Journal title
Journal de physique. IV → ACNP
ISSN journal
11554339
Volume
5
Issue
C5
Year of publication
1995
Pages
89 - 96
Database
ISI
SICI code
1155-4339(1995)5:C5<89:MSOTGD>2.0.ZU;2-O
Abstract
The pyrolysis of CH4, of C3H8 and of the mixture 20C(3)H(8)/80CH(4) wa s investigated in a hot wall CVD reactor by mass spectrometry. Experim ents were conducted as a function of temperature and of surface-to-vol ume (S/V) ratio of the substrate. The main by-products of the pyrolysi s were identified and reaction mechanisms were proposed taking into ac count homogenous decomposition/formation reactions. Cyclic species are possibly involved in the formation mechanism of pyrocarbon.