A. Grafov et al., DESIGN OF ZR(IV) AND HF(IV) COORDINATION-COMPOUNDS - PRECURSORS FOR MOCVD SYNTHESIS OF PROTECTIVE COATINGS, Journal de physique. IV, 5(C5), 1995, pp. 497-502
Design and creation of new materials with unusual, predictable or pred
eterminated properties become one of the most actual problems of moder
n applied chemistry. Main demands are discussed, which are made to che
mical compounds used in CVD synthesis of functional materials. A divis
ion of volatile metal-containing precursors into main classes is given
. On the basis of volatility and thermal stabiliti criteria elaborated
at IGIC-NASU, we have designed, synthesized and characterized a serie
s of new advanced precursors for Zr(IV) and Hf(IV). Their properties a
re compared to those of known species. A possibility of formation of r
equested properties and structure of final materials is shown.