CVD SYNTHESIS OF HTSC FILMS USING VOLATILE COORDINATION-COMPOUNDS

Thin HTSC films of YBa2Cu3O7-x with high c-axis orientation have been grown using PE MOCVD technique and adducts of copper, yttrium and bari um acetylacetonate with alpha,alpha'- dipyridyl as precursors. In-situ films were deposited in N-2 and O-2 gas reactant mixture at reduced s ubstrate temperatures. HTSC films prepared on SrTiO3, ZrO2(Y) and MgO substrates have rather high electric characteristics (e.g. j(c) approx imate to 10(4) - 10(5) A/cm(2)). The problem of beta-diketonate adduct s using as precursors for plasma enhanced chemical vapor deposition of superconductive films was discussed.