IN-SITU MONITORING OF THE RELATIVE DISTRIBUTION OF RADICALS BY A 2-PROBE SYSTEM

A new technique to determine the relative spatial distribution of radi cal concentration without Abel transformation is presented. By monitor ing spatial light intensities with an optical probe inserted into the plasma, the relative spatial distribution of the radical species is in vestigated. The relative spatial uniformity of the radical atom is als o investigated by normalizing the emission intensity of the radical at oms to the plasma parameters (electron-impact excitation rate coeffici ent and plasma density). The movable probe technique has a simple conf iguration and provides accurate information on the relative spatial di stribution of radicals in any plasma source. (C) 1995 American institu te of Physics.