VISTA - USER-INTERFACE, TASK LEVEL, AND TOOL INTEGRATION

Succeeding an earlier paper [1] on the data level, the Viennese Integr ated System for Technology CAD Applications (VISTA), an integration an d development system for Technology CAD, is presented. Starting with a short overview of TCAD methodology and existing integrated systems, p ortability and comprehensibility are postulated as key considerations and an application-framework architecture is proposed. The design of V ISTA's user interface and task level, presented nest, adheres strictly to these guidelines, To enable the cooperation of independent simulat ion tools, an automatic triangulation-based service is provided by VIS TA to resolve inconsistencies in wafer representations, A final exampl e shows how three different simulators, integrated by the framework ar e used to simulate a planarized, trench-isolated 0.25 mu m CMOS proces s.