The growth mechanisms of coevaporated SmBa2Cu3Oy, (Sm123) films grown
epitaxially on [100] SrTiO3 substrates were investigated using scannin
g probe microscopy, transmission electron microscopy, scanning electro
n microscopy, and x-ray diffraction. The Sm123 films were predominantl
y oriented with their crystallographic c axis perpendicular (c perpend
icular to) to the substrate. Only small fractions of grains with their
c axis parallel to the substrate (c parallel to) and some impurity ph
ases were found. It was found that Sm123 growing with a c perpendicula
r to orientation displayed a frequent bending of its unit-cell thick l
ayers, which could often be related to the presence of impurity phases
. We present strong evidence that this impurity-related bending of the
Sm123 lattice is responsible for the formation of screw dislocations.
Furthermore, we find that the volume fraction of c parallel to to c p
erpendicular to material increases with increasing chamber pressure an
d decreasing substrate temperature, indicating that kinetic factors (i
.e., reduced mobility of the adsorbed species during film growth) play
an important role for the formation and growth of c parallel to grain
s. No evidence for a strain-driven crossover from c perpendicular to t
o c parallel to growth as a function of film thickness was found. It w
as also observed that the presence of c parallel to outgrowths depends
on the amount of CuO droplets on the surface of the films. This sugge
sts that impurity phases can play a role in the formation of c paralle
l to grains. Finally, many of the impurity phases observed in our film
s are unexpected from a thermodynamic point of view, suggesting that t
he kinetic barrier to their creation is low. Based on the results pres
ented here, the smoothest and most homogeneous RBa(2)Cu(3)O(y) (R = Y
or lanthanide) films are expected to grow under conditions which favor
a high surface mobility during film growth.