X-ray absorption spectroscopy (XAS) has been used to study the chemica
l composition of a (100) textured CVD diamond film. Carbon K-edge XAS
is one of the most suitable techniques which appear to be sensitive to
the chemical environment of carbon atoms at the surface/near-surface
region. The XAS spectra of the textured CVD diamond film indicates the
presence of (C-H)- and (C=C)-groups and/or graphitic contamination on
the surface. Furthermore, the (001) surface of a highly oriented pyro
lytic graphite (HOPG) exhibits hydrogen located at steps and kinks aft
er cleavage and cleaning in ultra-high vacuum.