APPLICATION OF ATOMIC-FORCE MICROSCOPY FOR MICROINDENTATION TESTING

Examples for applications of an atomic force microscope (AFM) in inden tation testing are discussed. Scanning of the diamond indenter tips pr ovided information on shape and wear, which could be used to consider the influence of tip blunting on hardness results during depth-recordi ng testing. In comparison, hardness was also determined from AFM image s of the residual indentations which reduced methodical problems inher ent in depth recording. In this case hardness values of aluminium bond pads could be correlated with the surface structure revealed by the A FM simultaneously.