An atomic force microscope was modified such that vibrations in the MH
z regime could be detected at the backside of the cantilever. The samp
le was insonified by an ultrasonic transducer attached to it. Images w
ith atomic resolution were obtained on a mica surface. The lowest reso
nance frequency of cantilevers is usually several kHz. Nevertheless, u
ltrasonic vibrations of high amplitude with frequencies of 1-15 MHz ca
n be transmitted to cantilevers by exciting flexural vibrations. The p
ropagation of the ultrasonic waves in the cantilever and their transmi
ssion from the sample surface to the cantilever are discussed, taking
into account non-linear effects.