TECHNICAL DESIGN BASIS OF MICROELECTRONIC SENSORS

Authors
CHAPLYGIN YA
Citation
Ya. Chaplygin, TECHNICAL DESIGN BASIS OF MICROELECTRONIC SENSORS, Measurement techniques, 37(11), 1994, pp. 1220-1225
Citations number
26
Categorie Soggetti
Instument & Instrumentation",Engineering
Journal title
Measurement techniques → ACNP
ISSN journal
05431972
Volume
37
Issue
11
Year of publication
1994
Pages
1220 - 1225
Database
ISI
SICI code
0543-1972(1994)37:11<1220:TDBOMS>2.0.ZU;2-X
Abstract
An analysis is given of the problem of making sensors Sor quantities i n physics and physical chemistry based on the achievements of microele ctronics. The modem technical design basis of microelectronic sensors is considered together with the direction of its further development. Data and results are given concerning the development of microelectron ic force, pressure, magnetic field, and hydrogen-leakage sensors.