Extensive measurements of hot-hole injection probability from silicon
into silicon dioxide covering a wide range of oxide fields and substra
te biases are presented and compared with results previously published
in the literature. It is found that, in the highly inhomogeneous elec
tric fields typically needed to induce substrate hole injection, nonlo
cal effects take place that limit the possibility to accurately descri
be injection probability data by means of a unique set of lucky carrie
r model parameters.