Y. Shi et al., C-60 FILMS FORMED BY IONIZED CLUSTER BEAM DEPOSITION - STRUCTURE AND DOPING BY ION-IMPLANTATION, Fullerene science and technology, 3(5), 1995, pp. 469-478
C(6)0 films were formed on a variety of substrates by ionized cluster
beam (ICB) technique. Their structure was found to depend on the accel
eration voltages and substrate. Then the C(6)0 films were implanted by
p(+)-ions with doses from 0-2X10(14) ion/cm(2). The in situ measureme
nt of electrical conductivity revealed an abrupt decrease of three ord
ers in resistance. The temperature coefficient of resistivity of the p
(+)-ion implanted C(6)0 film remained in a negative value.