Le. Eng et al., MULTIPLE-WAVELENGTH VERTICAL-CAVITY LASER ARRAYS ON PATTERNED SUBSTRATES, IEEE journal of selected topics in quantum electronics, 1(2), 1995, pp. 624-628
We demonstrate a spatially chirped resonant wavelength in vertical cav
ities and vertical cavity surface emitting lasers (VCSEL's) grown by M
olecular Beam Epitaxy. The wavelength shift is achieved by varying the
GaAs growth rate across the wafer using a patterned backing substrate
to induce a lateral temperature profile. Temperature patterns transfe
r to thickness patterns with a resolution on the millimeter scale. We
demonstrate 8-nm periodic cavity mode shifts in GaAs-AlAs Fabry-Perot
vertical cavities, and a 20-nm shift in lasing wavelength in a VCSEL a
rray.