MULTIPLE-WAVELENGTH VERTICAL-CAVITY LASER ARRAYS ON PATTERNED SUBSTRATES

We demonstrate a spatially chirped resonant wavelength in vertical cav ities and vertical cavity surface emitting lasers (VCSEL's) grown by M olecular Beam Epitaxy. The wavelength shift is achieved by varying the GaAs growth rate across the wafer using a patterned backing substrate to induce a lateral temperature profile. Temperature patterns transfe r to thickness patterns with a resolution on the millimeter scale. We demonstrate 8-nm periodic cavity mode shifts in GaAs-AlAs Fabry-Perot vertical cavities, and a 20-nm shift in lasing wavelength in a VCSEL a rray.