We have presented in this paper a semi-numerical simulation of dispers
ive transport under one-dimensional nonuniform electric field which co
uld be used to study dispersive transport of carriers in the oxide. Ou
r simulation is based on continuous time random walk principles (CTRW)
. Previous formulations using CTRW were derived under the assumption o
f uniform electric field. Comparison of our simulation results with th
e equivalent uniform field case shows that the treatment of nonuniform
electric field is necessary to correctly predict events linked to dis
persive transport, such as the growth of trapped oxide charge due to h
ole trapping or interface states due to H+ ions reaching oxide semicon
ductor interface of metal-oxide-semiconductor devices. (C) 1995 Americ
an Institute of Physics.