SELF-CONSISTENT MULTIDIMENSIONAL ELECTRON KINETIC-ANALYSIS FOR INDUCTIVELY-COUPLED PLASMA SOURCES

Based upon the kinetic equations coupled with electromagnetic analysis for the recently developed inductively coupled plasma sources (ICPS), a self-consistent electron kinetic model is presented for 2-D (r,z) i n a cylindrically symmetric configuration space and 2-D (v(T)heta, v(z )) in the velocity space. The EM model is based on the mode analysis, while the kinetic analysis gives the perturbed Maxwellian distribution of electrons by solving the Boltzmann-Vlasov equation. The kinetic an alysis shows that the RF energy in an ICPS is extracted by a collision less dissipation mechanism, once the electron thermovelocity is close to the RF phase velocities determined by the reactor height and mode i ndexes. In this context, the effect of varying the reactor geometry is reported,in terms of the electron energy distribution function, The a nalytical results are compared to the experimental data in [1], which shows qualitative agreements in many aspects.