ONE-DIMENSIONAL FLUID MODEL OF ECR DISCHARGE WITH INHOMOGENEITY EFFECTS OF EXTERNAL MAGNETIC-FIELD

A one-dimensional fluid model of the microwave electron cyclotron reso nance (ECR) discharge, which includes the inhomogeneity effects of the external magnetic field, is developed. We use fluid equations which a re obtained from the one-dimensional Bolzmann equation expressed in te rms of magnetic moment and parallel velocity. We model the plasma and sheath separately, and appropriate plasma-sheath boundary conditions a re utilized, Microwave is represented by an energy how, and treated by a ray tracing technique. For the argon discharge, we obtain various q uantities such as the axial profiles of plasma density, electron tempe rature, electrostatic potential, fluid velocity, and microwave power d eposition. The results of simulation compare well with the experimenta l observation of the mirror field effects on the plasma parameters.