MODELING OF ELECTRON-CYCLOTRON-RESONANCE DISCHARGES

A simple model to predict the spatially-averaged plasma characteristic s of electron cyclotron resonance (ECR) reactors is presented. The mod el consists of global conservation equations for species concentration , electron density and energy. A gas energy balance is used to predict the neutral temperature self-consistently. The model is demonstrated for an ECR argon discharge. The predicted behavior of the discharge-as a function of system variables agrees well with experimental observat ions.