PARTICLE-IN-CELL SIMULATION OF GLOW-DISCHARGES IN COMPLEX GEOMETRIES

We present a general numerical framework for modeling plasma processin g devices, Based on the particle-in-cell method, in which any material can be represented by particles, we model plasmas, fluids, dust parti cles and structures, and their interactions, We define classes of part icles, each of which represents a different material, and each of whic h is hosted by an independent code module, For example, an object modu le represents structures and imposes boundary conditions corresponding to complex geometries on to the plasma and fluid particles, We descri be the formulation of PIC for a drift-diffusion model, calculate the i nteraction with dielectrics and conductors, compare the results of the code with calculations of DC discharges, and present an example that illustrates the geometric complexity that can be modeled.