RECENT RESULTS OBTAINED AT IMEC ON MULTICRYSTALLINE SILICON SOLAR-CELLS

In order to optimize the efficiency of multicrystalline silicon solar cells, the influence of specific process steps and sequences were stud ied. Therefore clean-room high efficiency as well as industrial screen printed cells were fabricated. Benefits are found in choosing a substr ate with lower base resistivity, using front and rear oxide passivatio n, using hydrogen passivation for bulk and surfaces, the use of Si3N4 with a double function i.e. as an anti-reflection and passivation laye r and the use of mechanical V-grooving. Efficiencies of 17% are found on 4 cm(2) clean-room fabricated cells and 15.2% has been obtained on 100 cm(2) V-grooved screenprinted industrial cells.