ATOMIC-FORCE MICROSCOPY STUDY OF FG-ANNEALED AND PECVD SILICON-NITRIDE AR-COATED SILICON SOLAR-CELLS

Atomic force microscopy has been used to study the surface structure a nd roughness of PECVD silicon nitride coated silicon solar cells. The surface roughness increases in some areas of the solar cells after for ming gas annealing. It may be one of the reasons for better light abso rption on the surface of the solar cells resulting in better solar cel l performance.